5 % E0, monochromatic kinetic energy of ion (MeV) 0.1 % Zmin, minimum boundary of desired depth region (¦Ìm) 1.3 % Zmax, Maximum boundary of desired depth region (¦Ìm) 8 % Dam_desired, the minimum desired damage in the same region to avoid the region is beyond the ion projected range 3 % dq0, dq0/180*pi for inclination angle, grid size definition for the DOFs in SSS 3 % dq1, (dq1, dq2)/180*pi for rotation axis 6 % dq2, Note: too small grid size is time-comsuming 100 % meshphi, delta phi size when rotating the sample, meshphi>90 is recommended,