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alfile_formatsqrt_tableinv_sqrt_tablesqrt_table_expinv_sqrt_table_explog_listseed2seed1ionZ_in_targethydrogen_in_targetexisting_elementsnumber_of_all_target_elementsnumber_of_materialsD_max_errD_min_errS_max_errS_min_errE_max_errE_min_errconv_create_separate_elementsatomic_namesatomic_massread_translationTrshape_fileshiftread_rotationRorxyzread_shearingShshearingSH_AAR_shearingread_scalingScscalingwrite_translationwrite_rotationwrite_shear_scaleread_csg_shapeTargetCompositionFileNamemy_nodesphere_R2taper_heighttaper_TgT2column_heightcolumn_R2vertex_Cntparaboloid_heightparaboloid_radiusparaboloid_RRparaboloid_RRHhyperboloid_heighthyperboloid_radiushyperboloid_distancehyperboloid_AAhyperboloid_BBhyperboloid_RRz0_max_csgprint_levelsub_surf_zs_countno_substrates0_csglist_of_materialsmy_shapeis_fullpointorientationpolygon_Cntpolygon_vertexdcabc2sphere_Cchange_axisLOLO1LVLV1trans_TTinterface_pathflight_length_typeran_log_listlog_listsubstrate_interface_pathsect_sortsphere_intersecttriangle_intersect_csgtetrahedron_intersectellipsoid_intersectplane2_intersectcuboid_intersecttaper_intersectparaboloid_intersecthyperboloid_intersectcolumn_intersectpolygon_intersectpolyhedron_intersectfreepath_csgcheck_target_type_csgtarget_radial_energy_electronstarget_radial_energy_phononstarget_radial_total_interstitialstarget_radial_total_displacementstarget_radial_total_replacementstarget_radial_total_vacanciestarget_radial_replacing_ionstarget_radial_implanted_ionstarget_depth_energy_electronstarget_depth_energy_phononstarget_depth_total_interstitialstarget_depth_total_displacementstarget_depth_total_replacementstarget_depth_total_vacanciestarget_depth_replacing_ionstarget_depth_implanted_ionstarget_energy_electronstarget_energy_phononstarget_composition_file_typetotal_sputter_countertarget_total_sputteredtarget_total_interstitialstarget_total_displacementstarget_total_replacementstarget_total_vacanciestarget_replacing_ionstarget_implanted_ionsuse_density_multtarget_compositiontarget_max_ztarget_max_ytarget_max_xtarget_size_ztarget_size_ytarget_size_xcell_volumecell_size_zcell_size_ycell_size_xcell_countlayer_count_yzcell_max_xycell_count_zcell_count_ycell_count_xgen_shape_or_notgeometry_typedo_not_store_damagestart_id_stringcreate_status_fileunit_conversion_factornormalize_outputoutput_formatwait_before_endTargetDensityMultFileNameElementsFileNameConversionFileNameMaterialsFileNameOutputFileBaseNameTargetStructureFileNameConfigFileNamemem_usagemem_usage_detailsmem_usage_onlyreduce_int_data4reduce_int_data3reduce_int_data2reduce_double_datareduce_int_datamax_no_ions_nodenum_nodesierrsputter_yield_histogramsingle_ion_sputter_yieldstransport_typescattering_calculationtracing_recoil_or_notmax_annular_coll_volumesstraggling_modelchu_valuesrecoil_cascades_fpstore_recoil_cascadesion_paths_fpstore_ion_pathsleaving_ionstransmit_liststore_exiting_limitstore_exiting_recoilstransmission_pointerstore_path_limitstore_transmitted_ionsstatus_update_intervalstorage_intervaloverride_energyoverride_max_ionsdisplay_intervalbeam_spreadenter_zenter_yenter_xion_distributionmin_energyion_vzion_vyion_vxion_initial_energyion_Mion_Zmax_no_ionsflight_length_conststore_energy_depositdetailed_sputteringsimulation_typeaiv_posaiv_inode_countnode_yznode_znode_ynode_xmsh_file_typesect0sectthick_of_layermaterial_of_layermax_no_layersGRBrzryrxazayaxdkdjdiline_flagtrans_ztrans_ytrans_xrot_xyzscaling_zscaling_yscaling_xitransirotiscales0_fetmz0_max_fetmbox_length_zbox_length_ybox_length_xbox_end_z0box_end_y0box_end_x0box_size_zbox_size_ybox_size_xbox_count_zbox_count_ybox_count_xbox_start_z0box_start_y0box_start_x0trianglexyz_flagnum_of_datamaterial_typenum_of_materialfile_formatran_listazim_angleerf_list_pointerinverse_erf_listsqrt_tableinv_sqrt_tablesqrt_table_expinv_sqrt_table_expsingle_input_fileionZ_in_targethydrogen_in_targetexisting_elementsnumber_of_all_target_elementsnumber_of_materialsscattering_matricesion_scattering_matrixD_max_errD_min_errS_max_errS_min_errE_max_errE_min_errcos_azim_anglesin_azim_angleinv_sqrt_log_listgauss_random_listsqrt_random_listrandom_listseed2seed1conv_create_separate_elementsatomic_namesatomic_massmost_abundant_isotoperotation_fetmrot_xyzcal_triangle_normalread_fetm_shapeshape_fileTargetCompositionFileNamebox_start_z0box_start_y0box_start_x0box_count_zbox_count_ybox_count_xbox_size_zbox_size_ybox_size_xmy_nodegen_shape_or_notfile_formatnum_of_materialmaterial_typenum_of_dataiscalescaling_zscaling_yscaling_xirotitranstrans_ztrans_ytrans_xsub_surf_zz0_max_fetmbox_length_xbox_length_ybox_length_zorientationbox_end_x0box_end_y0box_end_z0enter_zdcGRBno_substrates0_fetmlist_of_materialstriangle_intersect_fetmLVLOray_triangle_intersectcal_step_in_boxmake_lineline_flagaxayazdidjdkrxryrzcheck_target_type_fetmjuintersectcheck_surf_bindcheck_material_typerefractionfreepath_fetmflight_length_typeran_log_listlog_listtransmissiontrianglexyz_flagsect0sectthick_of_layermaterial_of_layermax_no_layersran_listazim_angleerf_list_pointerinverse_erf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